无需精确调整被测镜的平面面形检测新方法
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TH744

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国家重点研发计划(2017YFA0701203)、北京理工大学创新人才科技资助专项(2019CX01020)项目资助


Flat measurement method without high precision adjustment of tested flat
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    摘要:

    现有的面形绝对检测法为了保证检测精度,在测量过程中需要耗费大量时间对被测镜进行精密的姿态调整。针对上述问题,提出了一种无需精密调整被测镜姿态的两平面面形检测方法。该方法需被测镜在3个位置进行测量:初始位置、旋转未知角度后的位置、横向平移未知距离后的位置。通过特征匹配求解被测镜实际旋转角度和平移量,通过迭代算法和拟合Zernike多项式恢复被测镜面形,并对被测镜面形中损失的角频率项进行补偿。该方法在保证精度的同时,避免了被测镜的精密调整,缩短了测量时间。实验表明,该方法与Vannoni的方法相比,二者检测结果的残差均方根(RMS)值为0004λ,测量中被测镜调整过程快速简单连贯,为光学元件的面形检测提供了一种新的技术途径。

    Abstract:

    Existing absolute measurement methods take a lot of time to align and adjust the tested flat precisely during the measurement process to ensure the high accuracy. In this paper, we propose a twoflat measurement method that does not require high precision adjustment of the tested flat. The method requires the tested flat measured three times, including the original position, the unknown angle after rotating, and the unknown distance after lateral shifting. The actual rotation angle and shift displacement of the tested flat are solved by feature matching. The surface of the tested flat is reconstructed by the iterative algorithm and Zernike polynomial fitting. Meanwhile, the compensation of the lost angular frequency terms is considered. This method avoids the precise adjustment and shorten the measurement time while ensuring the measurement accuracy. Compared with Vannoni′s method, experimental results show that root mean square (RMS) of the residual of the two measurement methods is 0004λ, and the adjustment process of the tested flat is fast, simple and coherent. The proposed method provides a new way of surface measurement for optical components.

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张培洁,赵维谦,杨帅,邱丽荣.无需精确调整被测镜的平面面形检测新方法[J].仪器仪表学报,2019,40(5):43-50

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  • 在线发布日期: 2022-02-10
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