Abstract:Aiming at the online testing needs of optical elements with various optical aperture sizes during processing stage, a compact transient interferometric measurement system used for online testing is proposed. A polarization camera is applied to realize the transient phaseshifting interferometric measurement of wavefront and reduce the effect of environmental disturbance. Combining the subaperture stitching technique based on configuration optimization algorithm, the accuracy requirement for the motion scanning platform is lowered and the fullaperture surface testing of large aperture optical elements can be achieved. To verify the feasibility of the proposed system, the online testing and subaperture stitching measurement of the centering tool of diamond turning machine and a large aperture spherical mirror were carried out, respectively. The results show that compared with the detection results of ZYGO interferometer, the absolute deviations of the corresponding root mean square values for the two cases are 0003 and 0007 μm, respectively. The system features compact layout and insensitivity to external environmental disturbance. The proposed system can nicely meet the application requirements of online installation and testing in complex environmental condition, and has wide application in online adjustment of centering tool of diamond turning machine and online testing of the optical components with various aperture diameters.