激光三角法位移测量多项式拟合及误差修正
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TH74

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国家重点研发计划(2018YFB2000403)、浙江省自然科学基金(LY18E050021)项目资助


Study of polynomial fitting and error correction method for laser triangulation displacement measurement
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    摘要:

    基于非接触高测量精度、便于使用等特点,激光三角法测距在科研和工业生产实践中已获得了广泛的应用。 位移测量 是通过激光斑在成像光敏面上的位移来决定的,在不同的应用中两者之间多项式拟合的参数选择也往往不同,选择合适的多项 式,实现快速、高精度测量对不同的应用有很重要的意义。 本文针对激光三角法位移测量被测面位移量 y 与成像光斑在光敏面 上位移量 x 之间的非线性关系,系统分析了 y 作为 x 的函数用多项式拟合过程中的误差来源,实验搭建了一台小型激光三角位 移传感器,根据实验测量数据,验证了搭建的激光三角位移测量装置满足 Scheimflug 条件,根据实验测量值和多项式拟合计算 的位移值,定义了一个评判拟合质量的质量因子 Q,通过计算 Q,确定了最佳多项式拟合。

    Abstract:

    Based on the characteristics of non - contact high measurement accuracy and ease of use, laser triangulation distance measurement has been widely used in scientific research and industrial production practice. Displacement measurement is determined from the shift of laser spot on an imaging system′s photo sensitive surface . Different application normally requires selection of different polynomial fitting coefficient terms between the two. Proper selection of polynomial terms is very important for realizing high speed and high accuracy in measurement. In this paper, regarding the non-linear relationship between the measured surface displacement y of laser triangulation displacement measurement and the displacement x of the imaging spot on the photosensitive surface, systematically analyzed the error sources due to polynomial fitting of y as a function of x. A miniature laser triangulation displacement sensor were built, Based on the experimental measurement data, it is verified that the laser triangle displacement measurement device satisfies the Scheimflug condition. According to the experimental measurement values and the displacement values calculated by polynomial fitting, a quality factor Q is defined to judge the quality of the fitting, and the optimal number of polynomial terms is determined by calculating the Q factor.

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王成武,陆惠宗,吴俊杰,孙爱西,屠明亮.激光三角法位移测量多项式拟合及误差修正[J].仪器仪表学报,2021,(5):1-8

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  • 在线发布日期: 2023-06-28
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