基于正交双行波磁场的平面二维时栅位移传感器
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TH7

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国家自然科学基金面上项目(51875069)、重庆市自然科学基金面上项目( cstc2021jcyj-msxmX0375)、重庆市研究生科研创新项目(CYS22658)、重庆理工大学研究生创新项目(gzlcx20222052)资助


Planar two-dimensional time grating based on the orthogonal dual traveling wave magnetic field displacement sensor
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    摘要:

    针对半导体行业、航空航天等领域对于精密二维位移测量的迫切需求,提出了一种基于正交双行波磁场的平面二维时 栅位移传感器。 传感器由定尺和动尺组成,定尺由导磁基体和沿 x、y 方向排列的两励磁线圈组成,动尺由导磁基体和沿 x、y 方 向排列的两层感应线圈组成。 当励磁线圈通入正余弦励磁信号时,在定尺上方产生分别沿 x 和 y 方向运动的正交双行波磁场。 通过对感应线圈输出的感应电信号进行解算得到 x 和 y 方向的位移值。 首先介绍了传感器的结构和工作原理,对传感器模型 进行了电磁场仿真;然后对仿真误差进行溯源分析,并优化传感器结构;最后采用印刷电路板技术制作了传感器样机,并设计相 应的电气系统进行实验验证。 实验结果表明该传感器在 160 mm×160 mm 测量范围内能够实现平面二维位移测量,x 方向节距 内位移误差峰峰值为 32. 8 μm, y 方向节距内位移误差峰峰值为 34. 5 μm。

    Abstract:

    To meet the urgent demand for precise two-dimensional positioning technology in the fields of semiconductor industry and aerospace, a planar two-dimensional time grating displacement sensor based on the orthogonal double traveling wave magnetic field is proposed in this article. The sensor consists of a stationary part and a movable part. The stationary part is composed of a magnetic conductive base and the excitation coils arranged in the x and y directions. The movable part is composed of the magnetic conductive base and the induction coils arranged in the x and y directions. An orthogonal traveling wave magnetic field is generated when the sine and cosine excitation signals are applied to excitation coils. The displacement values in x and y directions are obtained by calculating the inductive electromotive force. In this article, the working principle and structure of the sensor is firstly introduced. Then, the electromagnetic field simulation of the sensor model is carried out. According to the simulation results, the error is traceability analyzed and the sensor structure is optimized. Finally, the sensor prototype is fabricated by the printed circuit board technology, and the corresponding electrical system is designed for experimental verification. Results show that the sensor can realize two-dimensional displacement measurement, and the measurement range is up to 160 mm×160 mm. The peak to peak value of displacement error in the x-direction is 32. 8 μm, and the peak to peak value of displacement error in the y-direction is 34. 5 μm within a pitch.

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武 亮,阿岩琛,吴玉龙,苏 瑞,鲁 进.基于正交双行波磁场的平面二维时栅位移传感器[J].仪器仪表学报,2022,43(12):58-65

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  • 在线发布日期: 2023-07-04
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