基于刚度轴偏角预估机制的 MEMS 多环谐振陀螺全闭环控制方法
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TH824

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国家自然科学基金(61971466)、装备预研基金快速扶持项目(80917020506)资助


Full-closed loop control method of MEMS disk resonant gyroscope based on the stiffness axis declination angle prediction mechanism
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    摘要:

    针对微机电系统多环谐振陀螺正交闭环回路存在控制误差问题,提出一种基于刚度轴偏角预估机制的多环陀螺全闭环 控制方法。 该方法通过对微机电系统多环谐振陀螺刚度轴偏角预估,实现正交闭环回路参数自动优化调整。 同时,提出了基于 刚度轴偏角预估机制的全数字化闭环控制方法,实现微机电系统多环谐振陀螺的驱动、检测、正交、模态匹配环路的全闭环控 制。 该方法可提升正交闭环回路信噪比,增强陀螺正交漂移的抑制能力,降低陀螺零偏输出,改善陀螺的零偏不稳定性。 实验 结果表明,采用本文提出的基于刚度轴偏角预估机制的全闭环控制方法后,微机电系统多环谐振陀螺的零偏输出由 0. 201°/ s 降低为 0. 021 3°/ s,零偏不稳定性由 39. 42°/ h 降低为 1. 237°/ h,分别降低了 9. 44 倍和 31. 86 倍,验证了该方法对提升微机电系 统多环谐振陀螺仪性能的有效性。

    Abstract:

    To reduce the control error in a quadrature closed-loop circuit of micro electro mechanical system (MEMS) disk resonant gyroscope, a full-closed loop control method of MEMS disk resonant gyroscope based on the stiffness axis declination angle prediction mechanism is proposed. The parameters of the quadrature closed-loop circuit are automatically optimized and adjusted by predicting the stiffness axis declination angle of MEMS disk resonant gyroscope. In addition, a digital full-closed loop control method based on the stiffness axis declination angle prediction mechanism is proposed to realize the digital full-closed loop control of the driving, detection, quadrature suppression, and mode matching. This method can improve the signal-to-noise ratio of quadrature suppression circuit, and enhance the gyroscope capability in the field of quadrature drift, zero output and bias instability suppression. Experimental results show that, after adopting the full-closed loop control method based on the stiffness axis declination angle prediction mechanism, the zero output of the MEMS disk resonant gyroscope is decreased from 0. 201°/ s to 0. 021 3°/ s and the bias instability is decreased from 39. 42°/ h to 1. 237°/ h, by 9. 44 times and 31. 86 times, respectively, which evaluate the effectiveness of this method for improving the performance of the MEMS disk resonant gyroscope.

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周 同,余卓林.基于刚度轴偏角预估机制的 MEMS 多环谐振陀螺全闭环控制方法[J].仪器仪表学报,2023,44(1):46-54

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  • 在线发布日期: 2023-07-04
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