高低温环境对三轴高 g 值加速度传感器灵敏度变化影响研究
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TH89 TP212

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Research on the influence of high and low temperature environment on the sensitivity change of three-axis high-g accelerometer
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    摘要:

    针对高低温环境对高 g 值加速度传感器灵敏度影响机理不清的问题,通过建立两端固支的敏感单元数学模型,得到了 传感器灵敏度与敏感单元纵向应力、横向应力的关系。 通过热-力耦合仿真分析得到了传感器灵敏度与温度间的关系,在 -40℃ ~ 50℃范围内,传感器灵敏度随温度的增加而减小,且在-40℃ ~ 20℃ 范围内灵敏度变化较快,在 20℃ ~ 50℃ 范围内灵敏 度变化较慢。 通过传感器高低温试验得到高低温环境下传感器灵敏度数据,-40℃条件下灵敏度大小为 0. 523 μV/ g;50℃ 条件 下灵敏度大小为 0. 516 μV/ g。 与仿真结果进行对比,验证了温度变化对传感器灵敏度的影响规律,为提升高 g 值加速度传感 器在高低温环境下测量精度具有理论参考意义。

    Abstract:

    Aiming at the unclear mechanism of the effect of high and low temperature environment on the sensitivity of high-g accelerometer, a mathematical model of the sensitive unit with a solid support at both ends is proposed. The relationship among the sensor sensitivity, longitudinal stress, and transverse stress of the sensitive unit is determined. The relationship between sensor sensitivity and temperature is obtained by thermal-force coupling simulation analysis. In the range of -40℃ ~ 50℃ , the sensor sensitivity decreases with the increase of temperature, and the sensitivity changes fast in the range of - 40℃ ~ 20℃ . It is slow in the range of 20℃ ~ 50℃ . The sensor sensitivity data under high and low temperature environment are collected by the sensor high and low temperature test. The magnitude of sensitivity at - 40℃ is 0. 523 μV/ g, the magnitude of sensitivity at 50℃ is 0. 516 μV/ g. The experiment results are compared with the simulation results to evaluate the effectiveness of temperature change on the sensor sensitivity law. For improving the measurement accuracy of high-g accelerometer under high and low temperature environment, it has theoretical reference significance.

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乔诗翔,李豪杰,于 航,陈志鹏.高低温环境对三轴高 g 值加速度传感器灵敏度变化影响研究[J].仪器仪表学报,2023,44(5):240-248

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  • 在线发布日期: 2023-08-17
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