Abstract:In the singlepath pointdiffraction threedimensional measurement system with only one fiber pair, the measurement accuracy in the lateral direction parallel to the fringle direction is poor. To solve this problem, a dualpath pointdiffraction interference system is proposed to enhance the accurate threedimensional measurement in this study. The influence of pointdiffraction wavefront error, structural layout of measuring probe and threedimensional iterative reconstruction algorithm on the threedimensional measurement accuracy is analyzed. Based on the analysis, the optimal system parameters (e.g., pointdiffraction source structure and structural layout of probe) are determined. The experimental results show that the accuracy of the singlepath pointdiffraction interference system for threedimensional measurement in the x and y directions are in the order of submicrons and microns, respectively. In comparison, the dualpath pointdiffraction interference system can reach the order of submicrons at three directrions. The feasibility and accuracy of the proposed system are verified. It provides a feasible method for the measurement threedimensional displacement and size without guide rail.