考虑移相参数匹配的任意腔长下多表面干涉测量
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TH744. 3

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国家重点研发计划(2016YFF0101905)项目资助


Multi-surface interference measurement with arbitrary cavity lengths considering phase-shifting parameter matching
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    摘要:

    传统的多表面波长调谐移相干涉法只能实现透明被测件处于固定位置下的测量,当移相值或者腔长改变时算法的有效 性和求解精度没有被深入讨论和分析。 为了在任意腔长下实现透明被测件各表面的同时测量,本文提出了一种可实现自适应 移相匹配的加权多步采样算法。 首先,基于特征多项式,介绍了一种具有移相误差和耦合误差抑制能力的加权多步相位解调技 术,可以同时对被测件的 3 个表面进行测量;进而,基于 Zernike 多项式,对移相参考系数和腔长系数的任意组合下的算法求解 误差进行了迭代计算和分析,为最优参数的匹配提供参考。 仿真结果表明所提出的算法求解残余误差小于 3×10 -4 λ0 。 此外, 引入 ISO- 25178 系列三维高度参数对算法性能进行了验证。 在实验中,利用 Fizeau 干涉仪分别对厚度为 10 和 5 mm 的透明平 板在不同腔长下进行了测量。 仿真和实验的结果表明,所提出的算法可以实现任意腔长和厚度下的多表面测量,其可靠性和实 用性得到了验证。

    Abstract:

    The traditional multi-surface wavelength tuning phase-shifting interferometry can only achieve the measurement of transparent objects in fixed positions, and the effectiveness and solution accuracy of the algorithms are not intensively discussed and analyzed when the phase-shifting value or cavity length is changed. To achieve the simultaneous measurement of various surfaces of the transparent objects at arbitrary cavity lengths, a weighted multi-step sampling algorithm that can achieve adaptive phase shift matching is proposed in this paper. Firstly, based on the characteristic polynomial, a weighted multi-step phase demodulation technique with phase-shifting error and coupling error suppression capability is introduced, which can measure three surfaces of a transparent object simultaneously. Then, based on the Zernike polynomial, the algorithm solution error is iteratively calculated and analyzed for the arbitrary combinations of the phase-shifting reference coefficient and cavity length coefficient to provide a reference for the optimal parameter matching. The simulation results show that the residual error of the proposed algorithm solution is less than 3×10 -4 λ0 . Besides, the 3D height parameters in the ISO-25178 series are introduced to verify the algorithm performance. In the experiments, a Fizeau interferometer was used to measure the transparent flat plates with thicknesses of 10 and 5 mm, respectively at different cavity lengths. The simulation and experiment results show that the proposed algorithm can achieve multi-surface measurements at arbitrary cavity lengths and thicknesses, and its reliability and practicality are verified.

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常 林,何婷婷,闫恪涛,王 陈,于瀛洁.考虑移相参数匹配的任意腔长下多表面干涉测量[J].仪器仪表学报,2021,(9):181-191

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  • 在线发布日期: 2023-06-28
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