变截面 FeGa 膜 / AT 切石英晶片复合谐振磁场传感器
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TN384 TH73

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国家重点研发计划项目(2021YFA0716501)资助


Variable cross-section FeGa film / AT-cut quartz wafer composite resonant magnetic field sensor
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    摘要:

    提出用变截面 FeGa 磁致伸缩膜与 AT 切石英晶片双面复合的磁场传感结构,变截面形状降低了磁膜汇聚区域的退磁 因子,进而将磁致伸缩应变汇聚到晶片的电极区域。 同时双面复合结构避免了晶片中沿厚度方向的应变方向发生改变,两者结 合提高了谐振传感器的磁场灵敏度。 推导的灵敏度公式表明,灵敏度与复合结构确定的应变传递系数、磁膜材料的压磁系数以 及磁膜厚度均成正比,与晶片厚度的平方成反比。 在厚度为 200 μm 的 AT 切石英晶片表面双面沉积 1 μm 厚的变截面 FeGa 膜 制备传感器样品,测试结果表明:传感器 Q 值为 5 489,线性区间的灵敏度达到 -0. 82 Hz / Oe,据此,当晶片厚度降低至 7. 5 μm 时,传感器灵敏度将达到 -583 Hz / Oe,并且可通过采用更高压磁系数的材料进一步提高。

    Abstract:

    A double-sided magnetic sensing composite structure is proposed using FeGa magnetostrictive films with variable cross-section on the top and the bottom of the AT-cut quartz wafer. The variable cross-section shape is utilized to reduce the demagnetization factor of the convergent area of the magnetic films, further increasing the strain in the electrode area. Meanwhile, the change in the strain direction along the wafer thickness direction can be avoided by adopting the double-sided composite structure. Therefore, the sensitivity of the resonant magnetic field sensor can be improved effectively by combining above two methods. The derived equations show that the sensitivity is positively correlated to the strain transfer coefficient determined by the composite structure, the piezomagnetic coefficient of the magnetostrictive material, and the thickness of the magnetic film, while inversely proportional to the square of the quartz wafer thickness. The sensor samples are fabricated by sputter deposition, with 1 μm thick variable cross-section FeGa films on the top and the bottom surface of the 200 μm thick AT-cut quartz wafer. Experimental results show that the Q value and sensitivity of the sensor are 5 489 and -0. 82 Hz / Oe, respectively. Therefore, when the thickness of the quartz wafer is reduced to 7. 5 μm, the sensitivity of the sensor can reach upwards to - 583 Hz / Oe. In addition, the sensitivity of the sensor can be further increased by using a higher piezomagnetic coefficient magnetostrictive material.

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鲍祥祥,文玉梅,陈冬雨,李 平,王 遥.变截面 FeGa 膜 / AT 切石英晶片复合谐振磁场传感器[J].仪器仪表学报,2021,(12):56-64

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  • 在线发布日期: 2023-06-28
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