微米级电容式静力水准器设计及标定研究
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TL53 TH74

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国家自然科学基金面上项目 (12075246)资助


Development and calibration of micron capacitive hydrostatic level sensor
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    摘要:

    基于当前高能同步辐射光源(HEPS)装置的沉降监测需求,课题组设计关键参数和结构,研制了国内首个微米级单极板 电容式静力水准器样机。 本文重点研究该水准器的标定和精度验证,针对传统的标准量块和位移台标定法存在标定精度低、机 械加工要求高等问题,创新性采用单水准器直接标定法和多段拟合参数获取方案,实现 10 mm 量程的微米级标定;同时提出采 用激光反馈干涉仪联合纳米级位移台直接监测液位变化,实现单水准器的全量程精度验证,精度 3 μm;通过重载位移台进行了 7 m 距离的两点监测系统的精度验证,在 10 mm 量程内相对高程监测精度可达到 5 μm。 结果表明样机精度符合设计要求,可 为我国大型装置的高精度高程向监测提供可靠手段。

    Abstract:

    Based on the current settlement monitoring requirements of high energy photon source (HEPS), the research group designs the key parameters and structure, and develops the first micron monopolar plate capacitive hydrostatic level sensor prototype in China. This article focuses on the calibration and accuracy verification of the level sensor. To address the problems of low calibration accuracy and high machining requirements of the traditional standard block and translation stages calibration method, the single level sensor direct calibration method and multi-segment fitting parameter acquisition scheme are innovatively adopted to realize the micron calibration within 10 mm range. Meanwhile, the laser feedback interferometer combines with nano translation stages is proposed to directly monitor the change of liquid level to realize the full range accuracy verification of single level sensor. And the accuracy is 3 μm. The accuracy of the two-point monitoring system with 7 m distance is evaluated by the heavy-duty translation stages. The relative monitoring accuracy of height can reach 5 μm in the range of 10mm. Results show that the accuracy of the prototype meets the design requirements, which can provide a reliable means for high-precision height monitoring of large-scale devices in China.

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马 娜,金伟其,董 岚,王 铜,何振强.微米级电容式静力水准器设计及标定研究[J].仪器仪表学报,2022,43(9):27-33

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  • 在线发布日期: 2023-02-06
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