基于偏心抑制的激光差动共焦焦距高精度测量方法
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TH741 TN249

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民用航天技术预先研究项目(D020402)、中央高校基本科研业务费专项资金(2023CX01006)项目资助


High-precision measurement method of laser differential confocal length based on eccentricity suppression
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    摘要:

    针对测量球面透镜焦距过程中存在偏心误差导致测量光轴与透镜实际轴线不重合的问题,提出了一种基于偏心抑制的 激光差动共焦焦距高精度测量方法,通过驱动工作台旋转测得透镜偏心误差的大小及方向,实现了对被测透镜的误差采集;通 过分析误差大小及方向驱动姿态调整电机,消除了测量过程中由于存在偏心误差对焦距测量精度产生的影响;通过构建系统, 优化系统参数,实现了激光差动共焦焦距高精度测量;最终实现基于偏心抑制的焦距高精度测量,解决了焦距测量时测量光轴 与透镜实际轴线不重合从而对测量结果产生影响的问题。 基于该系统进行了焦距测量实验,实验表明:测量焦距为 100 mm 透 镜时,该方法相对重复测量精度(RMS)可达到 0. 000 503% 。 该方法显著提高了焦距测量的精度及重复测量精度,为焦距的精 密测量提供了一种有效的途径。 同时,该方法可应用到镜组加工与装配中,提高镜组的成像质量与测量精度。

    Abstract:

    Considering that the eccentricity error in the process of measuring the focal length of spherical lens results in the uncoincident measured optical axis relative to the actual axis of lens, a high-precision measurement method of laser differential confocal length based on eccentric suppression is proposed, where the size and direction of the lens′ center deviation are measured by rotating the table to realize the error acquisition of measured lens. By analyzing the error value and direction driving attitude adjustment motor, the influence of eccentricity error on the accuracy of focal length measurement is eliminated during the measurement process. By constructing the system and optimizing the system parameters, the high-precision measurement of laser differential confocal length is realized. Finally, the high-precision measurement of focal length based on eccentricity suppression is realized, which solves the problem that the measurement results are affected by the uncoincident measured optical axis relative to the actual axis of the lens during focal length measurement. Based on this system, the focal length measurement experiment results show that the relative repeatability measurement accuracy (RMS) can reach 0. 000 503% when the focal length is measured with a 100 mm lens. This method significantly improves the accuracy of focal length measurement and repeated measurement accuracy, which provides an effective way for precision measurement of focal length. At the same time, this method can be utilized for the processing and assembly of the lens group to improve the imaging quality and measurement accuracy of the lens group.

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杜 卓,王 伟,王 允,崔 健,赵维谦.基于偏心抑制的激光差动共焦焦距高精度测量方法[J].仪器仪表学报,2023,44(11):39-46

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  • 在线发布日期: 2024-01-29
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